Title
Independent contribution of optical attenuation length in ultrafast laser-induced structural change
Author
Tatsunori Shibuya, Kazuyuki Sakaue, Hiroshi Ogawa, Daisuke Satoh, Thanh-Hung Dinh, Masahiko Ishino, Masahito Tanaka, Masakazu Washio, Takeshi Higashiguchi, Masaharu Nishikino, Akira Kon, Yuya Kubota, Yuichi Inubushi, Shigeki Owada, Yohei Kobayashi, and Ryunosuke Kuroda
Year
2021
Journal
Optics Express
Abstract
Although laser irradiation with femtosecond pulses is known to generate crystallization and morphological changes, the contribution of optical parameters to material changes is still in discussion. Here, we compare two structures irradiated near Si–L2,3 edges by an extreme ultraviolet femtosecond pulse. Our result implies that, despite the femtosecond irradiation regime, these values of the optical attenuation length between the wavelengths of 10.3-nm and 13.5-nm differ by one order of magnitude. From the structural comparison, the original crystalline state was maintained upon irradiation at 13.5-nm, on the other hand, transition to an amorphous state occurred at 10.3-nm. The difference in optical attenuation length directly influence to the decision of material crystallization or morphological changes, even if the irradiation condition is under the femtosecond regime and same pulse duration. Our result reveals the contribution of optical attenuation length in ultrafast laser-induced structural change.
Instrument
NRS-5500
Keywords
Raman spectroscopy, laser, ultra-fast