Field-rugged FTIR for in-situ monitoring of chemical vapor deposition (CVD)
May 6, 2024
Introduction
![VIR-9000 Series](https://jascoinc.com/wp-content/uploads/2013/10/Jasco-VIR-9000-1.jpg)
Monitoring of the chemical vapors during vapor deposition assures proper mixtures for consistent film growth. FTIR monitoring of the chemical vapors can provide instant feedback ensuring proper film composition. With a small footprint, high sensitivity and flexible optical configuration, the VIR-9000 can be used for monitoring the chemical vapor deposition process. The VIR-9000 series also includes a comprehensive software package for identification and quantitation of the chemical vapor composition.
Monitoring of chemical vapors
Light emission analysis
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![JASCO Application Note](https://jascoinc.com/wp-content/uploads/2023/10/app-pdf-header-2.png)
Field-rugged FTIR for in-situ monitoring of chemical vapor deposition (CVD)
Introduction
![VIR-9000 Series](https://jascoinc.com/wp-content/uploads/2013/10/Jasco-VIR-9000-1.jpg)
Monitoring of the chemical vapors during vapor deposition assures proper mixtures for consistent film growth. FTIR monitoring of the chemical vapors can provide instant feedback ensuring proper film composition. With a small footprint, high sensitivity and flexible optical configuration, the VIR-9000 can be used for monitoring the chemical vapor deposition process. The VIR-9000 series also includes a comprehensive software package for identification and quantitation of the chemical vapor composition.