Industrial Gas Analysis System – PFC Gas Analysis
May 1, 2024
Download This ApplicationIntroduction
PFC (Perfluorocarbon) gases such as CF3, C2F6, C4F8 and CHF3 are used as cleaning agents for dry-edging and CVD equipment, a critical process in the manufacturing of semiconductors. PFC gases are recognized as global warming, or, ‘greenhouse’ gases and there is an urgent need to control further emission of these gases. FTIR spectroscopy is useful for the analysis of PFCs. The VIR Series of FTIR spectrometers is compact (Footprint: A4 size, Weight: 18 kgs.), with proven performance suitable for on-line industrial monitoring applications. A multi-pass, long-path gas cell provides maximum throughput with excellent sensitivity, the VIR series can be configured for either flow through or static measurement of semiconductor PFC gases. Multivariate analysis methods (CLS, PCR, PLS and ellipson) can all be used for the simultaneous quantitation of multi-component samples.
Keywords
230-QU-0181, GAS-8M-VIR Gas Cell, CF3, C2F6, C4F8, CHF3, perfluorocarbon, gas analysis, FTIR, CLS PCR, PLS
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Industrial Gas Analysis System – PFC Gas Analysis
Introduction
PFC (Perfluorocarbon) gases such as CF3, C2F6, C4F8 and CHF3 are used as cleaning agents for dry-edging and CVD equipment, a critical process in the manufacturing of semiconductors. PFC gases are recognized as global warming, or, ‘greenhouse’ gases and there is an urgent need to control further emission of these gases. FTIR spectroscopy is useful for the analysis of PFCs. The VIR Series of FTIR spectrometers is compact (Footprint: A4 size, Weight: 18 kgs.), with proven performance suitable for on-line industrial monitoring applications. A multi-pass, long-path gas cell provides maximum throughput with excellent sensitivity, the VIR series can be configured for either flow through or static measurement of semiconductor PFC gases. Multivariate analysis methods (CLS, PCR, PLS and ellipson) can all be used for the simultaneous quantitation of multi-component samples.
Keywords
230-QU-0181, GAS-8M-VIR Gas Cell, CF3, C2F6, C4F8, CHF3, perfluorocarbon, gas analysis, FTIR, CLS PCR, PLS