Introduction

Qualitative analysis for particles plays a major role in decreasing spacing is off – please try to fix manufacturing processes. Integrating near-field technology with IR spectroscopy makes it possible to identify organic particles of a few µm in size. Pinpointing the particle position by topography measurements (Fig.1) and measuring by near-field IR spectroscopy (Fig.2) shows that the particle in the mixture consists of polyacrylamide and silicon resin. The sectional view (Fig.3) illustrates the resolution performance.