Monitoring of the chemical vapors during vapor deposition assures proper mixtures for consistent film growth. FTIR monitoring of the chemical vapors can provide instant feedback ensuring proper film composition. With a small footprint, high sensitivity and flexible optical configuration, the VIR-9000 can be used for monitoring the chemical vapor deposition process. The VIR-9000 series also includes a comprehensive software package for identification and quantitation of the chemical vapor composition.
Monitoring of chemical vapors
Light emission analysis