Field-rugged FTIR for in-situ monitoring of chemical vapor deposition (CVD)

By Carlos Morillo

Download PDF December 10, 2018

  • Industry

  • Technique

Introduction

VIR-9000 Series
VIR-9000 Series

Monitoring of the chemical vapors during vapor deposition assures proper mixtures for consistent film growth. FTIR monitoring of the chemical vapors can provide instant feedback ensuring proper film composition. With a small footprint, high sensitivity and flexible optical configuration, the VIR-9000 can be used for monitoring the chemical vapor deposition process. The VIR-9000 series also includes a comprehensive software package for identification and quantitation of the chemical vapor composition.

Monitoring of chemical vapors

Light emission analysis

About the Author

Dr. Carlos Morillo received his Post Doc at Advanced Industrial Science & Technology in Fukuoka and was a Research Scientist at Kyushu University in Japan where he lived for several years. Carlos received his Doctor of Engineering from Kyushu University and his Masters and BS from Simon Bolivar University in Caracas Venezuela. He is an Applications Scientist at JASCO.