Industrial Gas Analysis System for Perfluorocarbon (PFC) Gas Analysis

Download PDF June 21, 2017

Introduction

PFC (Perfluorocarbon) gases such as CF3, C2F6, C4F8 and CHF3 are used as cleaning agents for dry-edging and CVD equipment, a critical process in the manufacturing of semiconductors. PFC gases are recognized as global warming, or, ‘greenhouse’ gases and there is an urgent need to control further emission of these gases. FTIR spectroscopy is useful for the analysis of PFCs. The VIR Series of FTIR spectrometers is compact (Footprint: A4 size, Weight: 18 kgs.), with proven performance suitable for on-line industrial monitoring applications. A multi-pass, long-path gas cell provides maximum throughput with excellent sensitivity, the VIR series can be configured for either flow through or static measurement of semiconductor PFC gases. Multivariate analysis methods (CLS, PCR, PLS and ellipson) can all be used for the simultaneous quantitation of multi-component samples.

Keywords

230-QU-0181 GAS-8M-VIR Gas Cell, CF3, C2F6, C4F8, CHF3, perfluorocarbon, gas analysis, FTIR, CLS PCR, PLS

About the Author

John Burchell is a seasoned JASCO veteran adept with chromatography and spectroscopy products. He is currently the business development manager for both instruments.