Introduction

On-line monitoring is often used to observe a process to ensure quality on a constant basis. The MV-2000 Series UV-visible PDA spectrophotometer offers excellent performance for a variety of applications and is highly configurable for a wide range of sample analyses. With the ability to perform transmission or reflection measurements, the MV-2000 Series can be used to make in-situ or on-line measurements for applications such as the monitoring chemical reactions or physical vapor deposition, manufacturing and polishing processes, and film thickness measurement.

Applications

• In-situ or on-line process monitoring
• Physical or Chemical Vapor Deposition
• Chemical/Mechanical Polishing
• Chemical Crystallization
• Final product inspection
• Optical materials Research & Development

Example of On-line Monitoring of an Amorphous Silicon Layer on a Solar Cell

Keywords

UV-visible diode array UV-visible spectrophotometer, process monitoring, fiber probe