Introduction

Automated Absolute Reflectance Measurement Accessory for the V-600 series

By using an optional angle selective analyzer, measurements of the phase difference of metal films can be provided. The system is more compact and simpler than a spectroscopic ellipsometer, while maintaining high precision. It is useful for routine measurement of semiconductors, optical devices and other new materials. Quarter-wave plates for evaluation of optical disks can also be inspected.

Phase difference spectra of a quarter-wave plate

Phase difference (∆) is calculated from the intensity ratio of reflected light, I-45/I+45 when the polarizer is set to +45º.

I-45: Intensity when the analyzer is set to -45º
I+45: Intensity when the analyzer is set to +45º