Phase Difference Measurements

By Heather Haffner

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August 23, 2022

Introduction

Automated Absolute Reflectance Measurement Accessory for the V-600 series

By using an optional angle selective analyzer, measurements of the phase difference of metal films can be provided. The system is more compact and simpler than a spectroscopic ellipsometer, while maintaining high precision. It is useful for routine measurement of semiconductors, optical devices and other new materials. Quarter-wave plates for evaluation of optical disks can also be inspected.

Phase difference spectra of a quarter-wave plate

Phase difference (∆) is calculated from the intensity ratio of reflected light, I-45/I+45 when the polarizer is set to +45º.

I-45: Intensity when the analyzer is set to -45º
I+45: Intensity when the analyzer is set to +45º

This document has been prepared based on information available at the time of publication and is subject to revision without notice. Although the contents are checked with the utmost care, we do not guarantee their accuracy or completeness. JASCO Corporation assumes no responsibility or liability for any loss or damage incurred as a result of the use of any information contained in this document. Copyright and other intellectual property rights in this document remain the property of JASCO Corporation. Please do not attempt to copy, modify, redistribute, or sell etc. in whole or in part without prior written permission.

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