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Home / Applications / Thickness distribution of thin films by ellipsometry

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Thickness distribution of thin films by ellipsometry

By Heather Haffner

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May 4, 2017

Introduction

The M-500 is a Spectroscopic Ellipsometer with Photo Elastic Modulator (PEM) optics and a patented optical servo for reference control. The M-500 is specifically designed for use in a semiconductor clean room or fabrication facility, using a horizontal sample introduction system. Coupled with a robotic wafer handling system, high throughput automated measurements are easily conducted. An automatic sample stage with a sample mapping program can measure the thickness distribution of thin films on a wafer. The integrated software includes various options such as multi-layer analysis, wavelength dispersion measurements of optical constants and other optional analysis programs.

Diagram of PEM Principle

Mapping measurement

The mapping measurement takes advantage of the PEM system’s high speed to enable film thickness and refractivity distribution measurement within a maximum of an 8 inch diameter of the sample surface. The mapping measurement program offers display features including 3-D representation, contour map, and color map. The figure shows the thickness distribution of silicon oxide on a four-inch substrate. An average film thickness and average refractive index of 902A and 2.01, respectively, is obtained. The film is thicker towards the center and thinner towards the edge of the wafer.

Si3N4Film on Si
This document has been prepared based on information available at the time of publication and is subject to revision without notice. Although the contents are checked with the utmost care, we do not guarantee their accuracy or completeness. JASCO Corporation assumes no responsibility or liability for any loss or damage incurred as a result of the use of any information contained in this document. Copyright and other intellectual property rights in this document remain the property of JASCO Corporation. Please do not attempt to copy, modify, redistribute, or sell etc. in whole or in part without prior written permission.

About the Author

JASCO Application Note

Thickness distribution of thin films by ellipsometry

Introduction

The M-500 is a Spectroscopic Ellipsometer with Photo Elastic Modulator (PEM) optics and a patented optical servo for reference control. The M-500 is specifically designed for use in a semiconductor clean room or fabrication facility, using a horizontal sample introduction system. Coupled with a robotic wafer handling system, high throughput automated measurements are easily conducted. An automatic sample stage with a sample mapping program can measure the thickness distribution of thin films on a wafer. The integrated software includes various options such as multi-layer analysis, wavelength dispersion measurements of optical constants and other optional analysis programs.

Diagram of PEM Principle

Mapping measurement

The mapping measurement takes advantage of the PEM system’s high speed to enable film thickness and refractivity distribution measurement within a maximum of an 8 inch diameter of the sample surface. The mapping measurement program offers display features including 3-D representation, contour map, and color map. The figure shows the thickness distribution of silicon oxide on a four-inch substrate. An average film thickness and average refractive index of 902A and 2.01, respectively, is obtained. The film is thicker towards the center and thinner towards the edge of the wafer.

Si3N4Film on Si
This document has been prepared based on information available at the time of publication and is subject to revision without notice. Although the contents are checked with the utmost care, we do not guarantee their accuracy or completeness. JASCO Corporation assumes no responsibility or liability for any loss or damage incurred as a result of the use of any information contained in this document. Copyright and other intellectual property rights in this document remain the property of JASCO Corporation. Please do not attempt to copy, modify, redistribute, or sell etc. in whole or in part without prior written permission.
28600 Mary’s Court, Easton, MD 21601 USA • (800) 333-5272 • Fax: (410) 822-7526 • jascoinc.com/applications

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