| Model | NRS-4500 |
|---|---|
| Monochromator: | Aberration-corrected, Czerny-Turner mount single monochromator, f = 200 mm |
| Wavenumber Scanning Mechanism: Wavenumber Range: | High-accuracy direct-drive type (with rotary encoder) Wavenumber repeatability: ± 0.2 cm-1 8,000 to 100 cm-1(standard) 8,000 to 50 cm-1 (option, required 532 nm E grade edge filter) |
| Resolution: | 2 cm-1/pixel (standard, 100 to 3,900 cm-1) 0.7 cm-1/pixel (option, 100 to 1,350 cm-1, 532 nm, 2,400 gr/mm grating, 1,650 pixel CCD) |
| Grating: | Standard: 900 gr/mm Selectable from 2,400, 1,800, 1,200, 600, 300, 150 gr/mm (Max. 4 gratings can be mounted simultaneously) |
| Optical Alignment: | Auto-Alignment (Laser light) Raman light path auto alignment function Automatic switching of imaging lens for optimized spectrograph illumination. |
| Rejection Filter Switching: | Automatic filter switching mechanism (up to 4 filters) as standard Notch filter: 5 year warranty Edge filter: 3 year warranty |
| Detector | |
| Detector: | Air-cooled Peltier CCD detector (Max. -60°C), 1,650 x 200 pixel, 16 µm x 16 µm, Visible to NIR |
| Optional Detectors: | Visible high sensitivity type, NIR high-sensitivity type, High-resolution type, InGaAs etc. |
| Laser | |
| Laser: | Standard: 532 nm, 20 mW Optional laser: 405, 442,457,488, 514.5,532,633,785,1,064 nm, etc. *Red wavelengths are recommended lasers. *In case of 1,064 nm, detector needs to be changed to InGaAs. |
| Number of Mountable Lasers: | Maximum 3 lasers (3 internal or 2 internal and 1 external) |
| Microscope | |
| Sample Observation: | High resolution CMOS camera (300 M pixel) |
| Confocal Optical System: | Standard |
| Spatial Resolution: | XY = 1 µm, Z = 1.5 µm |
| Objective Lens: | 5x, 20x, 100x, (Plan Achromat objective lens) Manual 6 position objective carousel as standard Electronic drive 6 position carousel as option. Long working distance type, NIR type, water immersion lenses are also available as options |
| Sample Stage: | Automatic XYZ stage with auto-focus function |
| Imaging Measurement: | Option, Automatic stage imaging with auto focus, XYZ 0.1 µm step, 3D imaging, omni-focus |
| Laser Safety Classification and Safety Mechanism: | Class I Interlock mechanism by software and hardware, Laser optical path protection |
| Macro Measurement: | Option, Carousel type macro-measurement unit is available as local upgrade option |
| Fiber Probe: | Option (Manual switching) |
| Other Hardware Options: | Dichroic mirror, Polarized observation, differential interference contrast, transmitted illumination |
| Software | |
| Standard Program: | Microscope spectra measurement, Validation, Spectra analysis, Imaging analysis, Wavenumber correction, Sensitivity correction, Fluorescence correction, JASCO canvas |
| Imaging Program: | Sample search function, Multiple focus function, Focused view, 3D structure observation, Peak calculation, PCA mapping, Refractive index correction |
| Correction Program: | Standard, Auto-fluorescence correction, Sensitivity correction, Wavenumber correction (Ne lamp and Std sample are included) |
| Optional Program: | Interval measurement analysis, Thermal change measurement, Imaging analysis, Stress analysis, Carbon analysis |
| Others | |
| Anti-Vibration Table: | Option (air source for anti-vibration table: nitrogen gas or air source, secondary pressure 0.25 - 0.3 MPa) |
| Dimension and Weight: | Main Unit 550 (W) x 610 (D) x 800 (H) mm, approx. 80 kg - Power Supply : 220 (W) x 320 (D) x 70 (H) mm, approx. 3 kg AC 100 V ±10 V, AC 200 V ±20 V, 200VA |
| Models | NRS-5500 | NRS-5600 |
|---|---|---|
| Spectrograph | ||
| Spectrograph (Focal Length) | Aberration-corrected Czerny-Turner monochrometer (f = 300 mm) |
|
| Scanning Mechanism | High-precision direct drive |
|
| Low Wavenumber Attachment | None | Standard (Excitation WL: 400 ~ 800 nm) |
| Wavenumber Range (Raman shift) | 50 ~ 8,000 cm-1*1 | 10 ~ 8,000 cm-1*2 |
| Maximum Resolution | 1 cm -1 (532 nm excitation, 1,800 gr/mm, 1,024 pixel CCD) 0.4 cm-1 optional (532 nm excitation, 2,400 gr/mm, 2,048 pixel CCD) |
|
| Grating | 1,800 gr/mm (Option: 3,600, 2,400, 1,200, 600, 300, 150 gr/mm) |
|
| Max. No. of Mountable Grating | 4 |
|
| UV Upgrade | Factory option for UV laser excitation (including UV optical elements and UV light observation camera) *3 |
|
| Rejection Filter | 532 nm notch filter (Option: notch filters and edge filters for other excitation wavelengths) |
|
| Rejection Filter Switching | Manual exchange (Option: automated 8-position switching mechanism) |
|
| Beam Splitter | Beam splitter with automated switching mechanism (Option: Dichroic Mirrors, Max. 2 dichroic mirrors can be mounted) *4 |
|
| Detector | ||
| Standard Detector | 4-stage Peltier cooled CCD detector (UV-NIR range, 1,024 × 255 pixel) |
|
| Optional Detectors | 4-stage Peltier cooled CCD detector (high-resolution, 2,048 × 512 pixel) Liquid-nitrogen-cooled InGaAs detector (for 1,064 nm excitation laser, 1,024 pixel) |
|
| Dual Detector Switching | Factory option (required when using 2 detectors) |
|
| Laser | ||
| Laser | 532 nm, 50 mW (Option: 244*5, 266*5, 325*5, 355*5, 442, 488, 514.5, 633, 660, 785, 1,064 nm) |
|
| Maximum Number of Lasers Mounted at a Time | Internal: Max. 2 *6, External: Max. 6 (Vis-NIR laser: Max. 3, UV laser: Max. 3), Total: Max. 8 lasers, 9 wavelengths |
|
| Microscope | ||
| Microscopic Observation | Standard: High-resolution built-in CMOS camera (Option: binocular, trinocular, polarization observation, differential interference, transmission illumination) |
|
| Confocal Optics | Standard |
|
| DSF (Dual Spatial Filter) | Standard *Not available for UV upgraded model |
|
| SRl (Spatial Resolution Image) | Standard *Not available for UV upgraded model |
|
| Objectives | 5×, 20×, 100× objectives (Option: Long working distance type, UV type, NIR type) |
|
| Standard Sample Stage | Manual XYZ stage (operable distance X: 75, Y: 50, Z: 30 mm) |
|
| Optional Sample Stages | XY autostage with joystick accessory (travel range X:100, Y:70 mm, 0.04 µm step), Z autostage (travel range Z:30 mm, 0.1 µm step) |
|
| SPRIntS Imaging | Factory option (including VertiScan, high-speed data import, 3D imaging measurement, Z autostage, autofocus function) |
|
| Autostage Imaging | Factory option (including imaging measurement, 3D imaging measurement, XYZ autostage, autofocus function) |
|
| Macro Measurement Unit | Factory option (SPRIntS imaging system and the Macro measurement unit cannot be provided simultaneously) |
|
| Auto-Alignment Feature | Laser beam auto-alignment, Raman scattering auto-alignment |
|
| SGI (Slit Guide Image) | Standard |
|
| Neon Lamp | Standard (for wavenumber correction) |
|
| Safety Feature | Integrated sample chamber laser interlock, laser light-path protection (Class 1 compliance) |
|
| Software | ||
| Standard Function | Point measurement, wide spectral-band measurement, basic spectral data processing functions, search/functional group analysis (Sadtler KnowItAll®), cosmic-ray removal, auto-fluorescence-correction, wavenumber correction, sensitivity correction, JASCO canvas (printing function), validation, user help function |
|
| Functions included in SPRIntS Imaging and Autostage Imaging | Omnifocal image, Real-time display of spectrum, chemical image and current measurement point, multi-image map, auto-focus (supporting both sample image contrast and laser focus algorithms), imaging analysis (including Peak height (ratio), Peak area (ratio), Peak shift, PWHH), PCA mapping, 3-D imaging (including 3-D Raman image display, 3-D image slice display) |
|
| Optional Programs | High-throughput screening measurement *7, interval measurement analysis, stress analysis *8, carbon analysis, polysilicon crystallinity evaluation, 2D correlation |
|
| Anti-Vibration Table *9 | Option (air source for anti-vibration table: nitrogen gas or air source, secondary pressure 0.25 - 0.3 MPa) |
|
| Dimensions (Main Unit Only) | 880(W) × 890(D) × 670(H) mm | 1360(W) × 890(D) × 670(H) mm |
| Weight (Main Unit Only) | About 200 kg | About 240 kg |
| Power Requirement | AC100 V ±10 V, 200 V ±20 V, 200 VA |
|
| Models | NRS-7500 | NRS-7600 |
|---|---|---|
| Spectrograph | ||
| Spectrograph (Focal Length) | Aberration-corrected Czerny-Turner monochrometer (f = 500 mm) | |
| Scanning Mechanism | High-precision direct drive | |
| Low Wavenumber Attachment | None | Standard (Excitation WL: 400 ~ 800 nm) |
| Wavenumber Range (Raman Shift) | 50 ~ 8,000 cm-1*1 | 10 ~ 8,000 cm-1*2 |
| Maximum Resolution | 0.7 cm -1 (532 nm excitation, 1,800 gr/mm, 1,024 pixel CCD) 0.3 cm-1 optional (532 nm excitation, 2,400 gr/mm, 2,048 pixel CCD) |
|
| Grating | 1,800 gr/mm (Option: 3,600, 2,400, 1,200, 600, 300, 150 gr/mm) | |
| Max. No. of Mountable Grating | 4 | |
| UV Upgrade | Factory option for UV laser excitation (including UV optical elements and UV light observation camera) *3 |
|
| Rejection Filter | 532 nm notch filter (Option: notch filters and edge filters for other excitation wavelengths) |
|
| Rejection Filter Switching | Manual exchange (Option: automated 8-position switching mechanism) | |
| Beam Splitter | Beam splitter with automated switching mechanism (Option: Dichroic Mirrors, Max. 2 dichroic mirrors can be mounted) *4 |
|
| Detector | ||
| Standard Detector | 4-stage Peltier cooled CCD detector (UV-NIR range, 1,024 × 255 pixel) | |
| Optional Detectors | 4-stage Peltier cooled CCD detector (high-resolution, 2,048 × 512 pixel) Liquid-nitrogen-cooled InGaAs detector (for 1,064 nm excitation laser, 1,024 pixel) |
|
| Dual Detector Switching | Factory option (required when using 2 detectors) | |
| Laser | ||
| Laser | 532 nm, 50 mW (Option: 244*5, 266*5, 325*5, 355*5, 442, 488, 514.5, 633, 660, 785, 1064 nm) | |
| Maximum Number of Laser Mounted at a Time | Internal: Max. 2 *6, External: Max. 6 (VIS-NIR laser: Max. 3, UV laser: Max. 3), Total: Max. 8 lasers, 9 wavelengths |
|
| Microscope | ||
| Microscopic Observation | Standard:High-resolution built-in CMOS camera (Option:binocular, trinocular, polarization observation, differential interference, transmission illumination) |
|
| Confocal Optics | Standard | |
| DSF (Dual Spatial Filter) | Standard *Not available for UV upgraded model | |
| SRl (Spatial Resolution Image) | Standard *Not available for UV upgraded model | |
| Objectives | 5×, 20×, 100× objectives (Option: Long working distance type, UV type, NIR type) |
|
| Standard Sample Stage | Manual XYZ stage (operable distance X: 75, Y: 50, Z: 30 mm) | |
| Optional Sample Stages | XY autostage with joystick accessory (travel range X:100, Y:70 mm, 0.04 µm step), Z autostage (travel range Z:30 mm, 0.1 µm step) |
|
| SPRIntS Imaging | Factory option (including VertiScan, high-speed data import, 3D imaging measurement, Z autostage, autofocus function) |
|
| Autostage Imaging | Factory option (including imaging measurement, 3D imaging measurement, XYZ autostage, autofocus function) |
|
| Macro Measurement Unit | Factory option (SPRIntS imaging system and the Macro measurement unit cannot be provided simultaneously) |
|
| Auto-Alignment Feature | Laser beam auto-alignment, Raman scattering auto-alignment | |
| SGI (Slit Guide Image) | Standard | |
| Neon Lamp | Standard (for wavenumber correction) | |
| Safety Feature | Integrated sample chamber laser interlock, laser light-path protection (Class 1 compliance) | |
| Software | ||
| Standard Function | Point measurement, wide spectral-band measurement, basic spectral data processing functions, search/functional group analysis (Sadtler KnowItAll), cosmic-ray removal, auto-fluorescence-correction, wavenumber correction, sensitivity correction, JASCO canvas (printing function), validation, user help function |
|
| Functions included in SPRIntS Imaging and Autostage Imaging | Omnifocal image, Real-time display of spectrum, chemical image and current measurement point, multi-image map, auto-focus (supporting both sample image contrast and laser focus algorithms), imaging analysis (including Peak height (ratio), Peak area (ratio), Peak shift, PWHH), PCA mapping, 3D imaging (including 3D Raman image display, 3D image slice display) | |
| Optional Programs | High-throughput screening measurement *7, interval measurement analysis, stress analysis *8, carbon analysis, polysilicon crystallinity evaluation, 2D correlation | |
| Anti-Vibration Table *9 | Option (air source for anti-vibration table: nitrogen gas or air source, secondary pressure 0.25 - 0.3 MPa) | |
| Dimensions (Main Unit Only) | 1060(W) × 1220(D) × 670(H) mm | 1540(W) × 1220 (D) × 670(H) mm |
| Weight (Main Unit Only) | About 230 kg | About 270 kg |
| Power Requirement | AC100 V ±10 V, 200 V ±20 V, 200 VA | |
*1 At 532 nm excitation wavelength with the standard rejection filter.
*2 At 532 nm excitation wavelength with the low wavenumber attachment.
*3 UV laser, edge filter for UV laser, and UV objectives are additionally required.
*4 One dichroic mirror can be mounted when either the UV upgrade or the SPRIntS imaging option is configured. No dichroic mirror can be utilized when both the UV upgrade and the SPRIntS imaging options are fitted.
*5 The specifications are partially different from the standard model when UV laser is used.
*6 The laser may not be internally mounted due to the specification of the laser.
*7 Autostage imaging option is required.
*8 SPRIntS imaging option or autostage imaging option is required.
*9 Raman system must be placed on anti-vibration or equivalent table.