Model | |||
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Optical System | Double beam single monochromator Czerny-Turner mount |
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Light Source | 30W Deuterium lamp, 20W Halogen lamp |
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Light Source (Option) | 150W Xenon lamp (air-cooled) |
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Wavelength Range | |||
Wavelength Accuracy | ± 0.3 nm (656.1 nm) ± 1.5 nm (1312.2 nm) |
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Spectral Bandwidth | 4, 8, 20, 40, L8, L20, L40 nm (NIR) | 2, 4, 10, 20, L4, L10, L20 nm (NIR) |
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Scan Modes | Continuous scan, step scan |
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Detector | Peltier-cooled PbS | Peltier-cooled InGaAs |
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Sample Observation | High resolution CMOS camera (1600 × 1200 pixel), optical zoom, ATOS feature, LED illumination |
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Sample Observation (Option) | Binocular, polarized observation, objective lens |
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Objective | Cassegrain objective, ×10, ×16, ×32 selectable *1 |
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Condenser Mirror | Cassegrain collection mirror, ×10, ×16, ×32 user-interchangeable *1 (Automated condenser mirror compensation function) |
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Aperture | User-selectable dual-aperture settings for circular and rectangular (slit type) apertures 10, 20, 30, 50, 100, 200 µm (×16 objective) 5, 10, 15, 25, 50, 100 µm (×32 objective) 16, 32, 48, 80, 160, 320 µm (×10 objective) |
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Sample Stage | Manual stage (working area: X 50 × Y 75 × Z 20 mm) *2 |
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Sample Stage (Option) | Auto stage (working area: X 76 × Y 52 × Z 25 mm, 1 µm step) *2, joystick (option) |
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Polarizer | Glan-Taylor, automatic insertion/angle setting |
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Analyzer (Option): | Glan-Taylor, automatic insertion/angle setting |
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Control Panel | Cassegrain switching and indicator, transmittance/reflectance mode indicator, aperture selection, measurement start/stop, auto focus, automatic condenser mirror compensation, optical zoom, automated sample illumination, sample compartment illumination ON/OFF, ATOS illumination ON/OFF |
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Dimensions | 700 (W) × 740 (D) × 640 (H) mm |
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Weight | 105 kg |
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Power Requirement | 150 VA |
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Software | |||
OS | |||
Program | Microscope Measurement (multi-point measurement, line and lattice mapping), Micro Spectra Analysis, Spectra Analysis (data processing such as film thickness calculation, color calculation, peak detection, derivatives), Time-Course Measurement, Validation, JASCO Canvas, Administrative Tools |
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Program (Option) *3 | Fixed wavelength mapping (line and lattice mode), auto focus, multi-image |
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