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Home / Applications / Evaluation of ITO Films

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Evaluation of ITO Films

By Leah Pandiscia, PhD

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August 23, 2022

Introduction

Absolute Reflectance Measurement System

V-7000 Series Absolute Relfectance Measurement System
V-7000 Series Automated Absolute Reflectance Measurement System

Indium oxide doped with tin oxide (ITO), is used to make transparent conductive coatings. Thin film layers can be deposited by electron-beam evaporation or sputtering. Typical applications of ITO-coated substrates include touch panel contacts, electrodes for LCD and electrochromic displays, energy conserving architectural windows, fog resistant aircraft and automobile windows, heat-reflecting coatings to increase light bulb efficiency, gas sensors, anti-static window coatings and wear resistant layers on glass, among numerous other applications.

Absolute Reflectance Spectra of 50 nm ITO (Indium Tin Oxide) on Silicon Substrate

50 nm ITO film on silicon substrate was measured at several incidence angles by using the absolute reflectance measurement system.

This document has been prepared based on information available at the time of publication and is subject to revision without notice. Although the contents are checked with the utmost care, we do not guarantee their accuracy or completeness. JASCO Corporation assumes no responsibility or liability for any loss or damage incurred as a result of the use of any information contained in this document. Copyright and other intellectual property rights in this document remain the property of JASCO Corporation. Please do not attempt to copy, modify, redistribute, or sell etc. in whole or in part without prior written permission.

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About the Author

Leah Pandiscia received her PhD from Drexel University where she studied Biophysical Chemistry. She is a Spectroscopy Applications Scientist.

JASCO Application Note

Evaluation of ITO Films

Introduction

Absolute Reflectance Measurement System

V-7000 Series Absolute Relfectance Measurement System
V-7000 Series Automated Absolute Reflectance Measurement System

Indium oxide doped with tin oxide (ITO), is used to make transparent conductive coatings. Thin film layers can be deposited by electron-beam evaporation or sputtering. Typical applications of ITO-coated substrates include touch panel contacts, electrodes for LCD and electrochromic displays, energy conserving architectural windows, fog resistant aircraft and automobile windows, heat-reflecting coatings to increase light bulb efficiency, gas sensors, anti-static window coatings and wear resistant layers on glass, among numerous other applications.

Absolute Reflectance Spectra of 50 nm ITO (Indium Tin Oxide) on Silicon Substrate

50 nm ITO film on silicon substrate was measured at several incidence angles by using the absolute reflectance measurement system.

This document has been prepared based on information available at the time of publication and is subject to revision without notice. Although the contents are checked with the utmost care, we do not guarantee their accuracy or completeness. JASCO Corporation assumes no responsibility or liability for any loss or damage incurred as a result of the use of any information contained in this document. Copyright and other intellectual property rights in this document remain the property of JASCO Corporation. Please do not attempt to copy, modify, redistribute, or sell etc. in whole or in part without prior written permission.
28600 Mary’s Court, Easton, MD 21601 USA • (800) 333-5272 • Fax: (410) 822-7526 • jascoinc.com/applications

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