Introduction

Combining near-field microscopy with infrared spectroscopy, the spatial resolution of infrared measurements are dramatically increased while maintaining the same powerful qualitative analysis capabilities of FT-IR spectroscopy. The measurement range of 4000 to 1000 cm-1 provides the majority of the mid-IR region. This system enables simultaneous measurements of the infrared spectrum and the 3-dimensional topography map. The figures below illustrate the measurement results for polystyrene beads on an aluminum (Al) mirror and an inorganic particle of ODS Silicon on a GaAs substrate.