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Home / Applications / Evaluation of Polysilicon

  • Industry

  • Technique

Evaluation of Polysilicon

By Leah Pandiscia, PhD

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August 23, 2022

Introduction

Raman Spectrometers

NRS Series Raman Spectrometers
Jasco NRS Series Raman Spectrometers

Raman spectroscopy is also effective in evaluating the crystallinity of polysilicon used in Thin Film Transistor (TFT) substrates in LCDs, solar cells and other devices. The peak position and half width analysis of the Raman bands demonstrate a correlation with crystallinity and particle size. The figure shows the results of mapping measurements for polysilicon on a glass substrate and then measuring the distribution of peak positions and half widths. Information on the crystallinity and the heterogeneity of particle size was obtained.

This document has been prepared based on information available at the time of publication and is subject to revision without notice. Although the contents are checked with the utmost care, we do not guarantee their accuracy or completeness. JASCO Corporation assumes no responsibility or liability for any loss or damage incurred as a result of the use of any information contained in this document. Copyright and other intellectual property rights in this document remain the property of JASCO Corporation. Please do not attempt to copy, modify, redistribute, or sell etc. in whole or in part without prior written permission.

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  • NRS-5000 Series Confocal Raman Microscope

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About the Author

Leah Pandiscia received her PhD from Drexel University where she studied Biophysical Chemistry. She is a Spectroscopy Applications Scientist.

JASCO Application Note

Evaluation of Polysilicon

Introduction

Raman Spectrometers

NRS Series Raman Spectrometers
Jasco NRS Series Raman Spectrometers

Raman spectroscopy is also effective in evaluating the crystallinity of polysilicon used in Thin Film Transistor (TFT) substrates in LCDs, solar cells and other devices. The peak position and half width analysis of the Raman bands demonstrate a correlation with crystallinity and particle size. The figure shows the results of mapping measurements for polysilicon on a glass substrate and then measuring the distribution of peak positions and half widths. Information on the crystallinity and the heterogeneity of particle size was obtained.

This document has been prepared based on information available at the time of publication and is subject to revision without notice. Although the contents are checked with the utmost care, we do not guarantee their accuracy or completeness. JASCO Corporation assumes no responsibility or liability for any loss or damage incurred as a result of the use of any information contained in this document. Copyright and other intellectual property rights in this document remain the property of JASCO Corporation. Please do not attempt to copy, modify, redistribute, or sell etc. in whole or in part without prior written permission.
28600 Mary’s Court, Easton, MD 21601 USA • (800) 333-5272 • Fax: (410) 822-7526 • jascoinc.com/applications

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