FTIR Linear Array Microscope for Qualitative Analysis of Semiconductor Contaminants
August 23, 2022
Introduction
Rapid IR imaging using a linear array FTIR microscope
The IMV-4000 Linear Array FTIR Microscope can be easily interfaced with any FT/IR-4000 or FT/IR-6000 instruments offering an advanced infrared (IR) imaging system. The IMV-4000 allows IR imaging with extremely high spatial resolution and excellent sensitivity using a linear array MCT detector. The IMV-4000 rapid scanning mechanism accomplishes the IR imaging of a 100 x 100 µm area in just 1.6 seconds. In addition, a single MCT element is included as a standard detector for point measurements to be used for maximum sensitivity. This system is a very powerful tool to detect contaminants in a silicon wafer, providing a spectral signature of the contaminant.
IR Imaging of a Patterned Silicon Wafer
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