AYT-4000 Film Thickness Measurement System
The auto Y-theta stage accessory is installed in the sample compartment of an FT/IR-4000 or FT/IR-6000 for measurement of thickness of thin films deposited on Si wafers using IR reflection or transmission.
A 12-inch wafer stage* with dedicated software for mapping measurement are both included.
*Optional holders for 8-inch, 6-inch, 5-inch and 4-inch wafers are also available.
Specifications
| Instrument | FT/IR-4000 or FT/IR-6000 (not vacuum type) |
| Measurement Mode | Transmission and Reflection (Center of incident angle: 15°) |
| Measurement options | Single-point, Lattice Mapping, Radial Mapping |
| Spot Size | Adjustable by aperture |
| Moveable Range | Y: 0-168mm, theta: 180-180° |
| Accuracy | Y: +/- 0.5mm, theta: +/- 0.19° |
| Purge | Yes |
| Polarization | Option |
| Communication | USB 2.0 |
| Dimension and Weight | (H) 408mm, (W) 377mm, (D) 433mm, 14 Kg |
