AYT-4000 Film Thickness Measurement System
The auto Y-theta stage accessory is installed in the sample compartment of an FT/IR-4000 or FT/IR-6000 for measurement of thickness of thin films deposited on Si wafers using IR reflection or transmission.
A 12-inch wafer stage* with dedicated software for mapping measurement are both included.
*Optional holders for 8-inch, 6-inch, 5-inch and 4-inch wafers are also available.
|Instrument||FT/IR-4000 or FT/IR-6000 (not vacuum type)|
|Measurement Mode||Transmission and Reflection (Center of incident angle: 15°)|
|Measurement options||Single-point, Lattice Mapping, Radial Mapping
|Spot Size||Adjustable by aperture
|Moveable Range||Y: 0-168mm, theta: 180-180°
|Accuracy||Y: +/- 0.5mm, theta: +/- 0.19°
|Dimension and Weight||(H) 408mm, (W) 377mm, (D) 433mm, 14 Kg