Film Thickness Measurement System

AYT-4000 Film Thickness Measurement System

AYT-4000 Film Thikness Measurement System
AYT-4000 Film Thickness Measurement System

The auto Y-theta stage accessory is installed in the sample compartment of an FT/IR-4000 or FT/IR-6000 for measurement of thickness of thin films deposited on Si wafers using IR reflection or transmission.

A  12-inch wafer stage* with dedicated software for mapping measurement are both included.

*Optional holders for 8-inch, 6-inch, 5-inch and 4-inch wafers are also available.

 

Specifications

InstrumentFT/IR-4000 or FT/IR-6000 (not vacuum type)
Measurement ModeTransmission and Reflection (Center of incident angle: 15°)
Measurement optionsSingle-point, Lattice Mapping, Radial Mapping
Spot SizeAdjustable by aperture
Moveable RangeY: 0-168mm, theta: 180-180°
AccuracyY: +/- 0.5mm, theta: +/- 0.19°
PurgeYes
PolarizationOption
CommunicationUSB 2.0
Dimension and Weight(H) 408mm, (W) 377mm, (D) 433mm, 14 Kg

Calculation of Film Thickness

The calculation of film thickness is made using a Fourier Transform of a ‘spatialgram’, the complex interference pattern can be used to measure thickness of multiple layers (in theory this is unlimited, but the practical limitation is typically around 15 to 20 layers, depending on the RI of each layer. The example shown here is a sample composed of 19 layers.

Reflection ‘Spatialgram’, frequency split by FFT

Each layer thickness is calculated  from the peak positions