Automated Film Thickness Measurement Systems

Film thickness measurement system with automated wafer cassette robot for unattended operation

Film Thickness

The UTS-2000 film thickness measurement system (for epitaxial layers) is a non-destructive, non-contact analysis method using the latest interferometric algorithms to provide highly accurate film thickness measurement. Using a proprietary frequency analysis method, the sample interference spectrum is converted to a ‘spatialgram’ and the film thickness calculated with a very high degree of accuracy. This integrated system offers film thickness measurements required by the exacting standards of the semiconductor industry including high-speed sample mapping, a wide thickness measurement range and supports the analysis requirements from process testing to R&D. The UTS-2000 can be configured with near-infrared or mid-infrared according to the thickness measurements required.

System Features

Measurement range

Measure substrate with  thickness from 0.25 to 750 µm.

Highly Accurate Film Thickness Measurements

Measurement of precision data using a high-accuracy interferometer and high throughput optics.

Robot Multi-Wafer Cassette

Optional automated cassette sampling system for fully automated measurement of multi-wafer cassettes.

Simple Operating System

Various conditions for measurement, mapping, and film thickness calculations are configured as preset methods and managed in a method table. Measurement of film thickness is initiated by simply selecting a required method from the table and clicking the ‘Measure’ button.

Overview of the Measurement Interface for the UTS-2000

Film Thickness

  1. Details of the measurement Information for an analysis
  2. Fringe or ‘Spatialgram’ spectrum
  3. Map of measurement points
  4. Graph of the distribution of film thickness on the sample


High Measurement Reproducibility

The following table shows consecutive measurement results for a QC test of an epitaxial layer on a silicon substrate. The error of 10 consecutive measurements is better than ±0.001 µm. These figures demonstrate extremely reproducible film thickness measurement obtained using the UTS-2000.

Reproducibility of Consecutive Measurements

Measurement No. Measured Value (µm) Deviation (µm)
1 4.9001 -0.0013
2 4.9014 0.0000
3 4.9010 -0.0004
4 4.9019 0.0005
5 4.9015 0.0001
6 4.9018 0.0004
7 4.9011 -0.0003
8 4.9014 0.0000
9 4.9017 0.0003
10 4.9021 0.0007
Average Value (µm): 4.9014
Standard Deviation (µm): 0.0006