UTS-2000 Film Thickness Measurement System – Specfications
| Measurement Method | FTIR interference method for film thickness measurements |
| Measurement Configuration | Reflection, Transmission (option) |
| Objectives | Near infrared: Lens objectives (4x) and Cassegrain objectives (15x, 30x) Mid-infrared: Cassegrain objectives (15x, 30x) |
| Focus Mechanism | 11mm stroke |
| Sampling Area | 20 x 20 µm to 1200 x 1200 µm |
| Sample Positioning | Verification of measurement area using an integrated CCD camera |
| Film Thickness | 0.25 to 750 µm (for Si) |
| Reproducibility | ±0.005 µm or less (for Si with identical measurements) |
| XY Stage Stage Movement Range | 200 x 200 mm Standard (Other options available) |
| XY Stage Minimum Step Size | 2 µm |
| Operating System | Windows 7 Professional |
| UPS (Uninterruptible Power Supply) | Maintains PC and display power for 15 minutes after a power failure |
| System Control | Spectra Manager Suite; Optics and X-Y stage control; Wafer cassette system control (option) |
| Table | Integrated vibration isolation table |
| Dimension and weight | 1240(W) x 862 (D) x 1763 (H) mm, Approx. 300 kg (excluding protrusions or optional cassette loading system) |
| Power Requirement | 300 VA |
AYT-4000 Film Thickness Measurement System – Specifications
| Instrument | FT/IR-4000 or FT/IR-6000 (not vacuum type) |
| Measurement Mode | Transmission and Reflection (Center of incident angle: 15°) |
| Measurement options | Single-point, Lattice Mapping, Radial Mapping |
| Spot Size | Adjustable by aperture |
| Moveable Range | Y: 0-168mm, theta: 180-180° |
| Accuracy | Y: +/- 0.5mm, theta: +/- 0.19° |
| Purge | Yes |
| Polarization | Option |
| Communication | USB 2.0 |
| Dimension and Weight | (H) 408mm, (W) 377mm, (D) 433mm, 14 Kg |